NUCLEATION AND GROWTH OF CUBIC BORON NITRIDE FILMS PRODUCED BY ION-ASSISTED PULSED LASER DEPOSITION
- 著者名:
Friedmann, T. A. Medlin, D. L. Mirkarimi, P. B. McCarty, K. F. Klaus, E. J. Boehme, D. R. Johnsen, H. A. Mills, M. J. Ottesen, D. K. Barbour, J. C. - 掲載資料名:
- Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 316
- 発行年:
- 1994
- 開始ページ:
- 959
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992153 [1558992154]
- 言語:
- 英語
- 請求記号:
- M23500/316
- 資料種別:
- 国際会議録
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6
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Evaluation of Amorphous Diamond-Like Carbon and Boron Nitride Films as Low Permittivity Dielectrics
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