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FIRST RESULTS FROM THE LOS ALAMOS PLASMA SOURCE ION IMPLANTATION EXPERIMENT

著者名:
Rej, D. J.
Conrad, J. R.
Faehl, R. J.
Gribble, R. J.
Henins, I.
Horswill, N.
Kodali, P.
Nastasi, M.
Reass, W. A.
Shamim, M.
Sridharan, K.
Tesmer, J. R.
Walter, K. C.
Wood, B. P.
さらに 9 件
掲載資料名:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
316
発行年:
1994
開始ページ:
593
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992153 [1558992154]
言語:
英語
請求記号:
M23500/316
資料種別:
国際会議録

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