BINDING OF COPPER AND NICKEL TO CAVITIES IN SILICON FORMED BY HELIUM ION IMPLANTATION

BINDING OF COPPER AND NICKEL TO CAVITIES IN SILICON FORMED BY HELIUM ION IMPLANTATION

著者名:

掲載資料名:

Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

316

発行年:

1994

開始ページ:

33

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992153 [1558992154]

言語:

英語

請求記号:

M23500/316

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018464
シリーズID:	PA00000011
会議名:	Symposium on materials synthesis and processing using ion beams
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.03

類似資料:

1 国際会議録 Binding of Copper to Nanocavities in Silicon Myers,S.M., Follstaedt,D.M., Bishop,D.M. Trans Tech Publications	7 国際会議録 CAVITIES IN He-IMPLANTED Si: "INTERNAL” SURFACE SCIENCE Follstaedt, D.M., Myers, S.M., Stein, H.J. Materials Research Society
2 国際会議録 GETTERING OF METAL IMPURITIES BY CAVITIES IN SILICON Myers, S.M., Follstaedt, D.M., Bishop, D.M., Medernach, J.W. Electrochemical Society	8 国際会議録 Cavity Nucleation and Evolution in He-Implanted Si and GaAs Follstaedt, D. M., Myers, S. M., Petersen, G. A., Barbour, J. C. MRS - Materials Research Society
3 国際会議録 Hardening of Nickel Alloys by Ion Implantation of Titanium and Carbon Myers, S. M., Follstaedt, D. M., Knapp, J. A., Christenson, T. R. MRS - Materials Research Society	9 国際会議録 Diffusion, Precipitation, and Cavity-Wall Reactions of Ion-Implanted Gold in Silicon Myers, S. M., Petersen, G. A. MRS - Materials Research Society
4 国際会議録 SOLUTE BINDING AT VOID SURFACES IN SILICON AND GERMANIUM Myers, S.M., Bishop, D.M., Follstaedt, D.M., Stein, H.J., Wampler, W.R. Materials Research Society	10 国際会議録 DEUTERIUM INTERACTIONS WITH ION-IMPLANTED OXYGEN IN Cu AND Au Myers, S.M., Swansiger, W.A., Follstaedt, D.M. Materials Research Society
5 国際会議録 SEGREGATION GEY?ERING BY IMPLANTATION-FORMED CAVITIES AND B-Si PRECIPITATES IN SILICON Myers, S., Petersen, G.A., Follstaedt, D.M., Seager, C.H., Headly, T.J., Michael, J.R., Deweerd, W., Koops, G., … Electrochemical Society	11 国際会議録 Micromechanical Properties of He-Implanted Ni Knapp, J.A., Follstaedt, D.M., Myers, S.M. Materials Research Society
6 国際会議録 PHOTOLUMINESCENCE OF SILICON NANOSTRUCTURES FORMED BY ION BEAM IMPLANTATION Redman, D.A., Follstaedt, D.M., Guilinger, T., Kelly, M. Materials Research Society	12 国際会議録 Deuterium permeation behavior in polrcristalline nickel implanted with nickeland helium ions Shi. Q-S, Thompson. A. D, Smeltzer. W. W, Riehm. P, M Kluwer Academic Publishers

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