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Investigations of the Chemical-Mechanical Polishing of Polymer Films for ILD Applications

著者名:
掲載資料名:
Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
381
発行年:
1995
開始ページ:
229
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992849 [1558992847]
言語:
英語
請求記号:
M23500/381
資料種別:
国際会議録

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