Low-Dielectric Constant Fluorocarbon Films
- 著者名:
- 掲載資料名:
- Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 544
- 発行年:
- 1999
- 開始ページ:
- 209
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994508 [1558994505]
- 言語:
- 英語
- 請求記号:
- M23500/544
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
American Institute of Chemical Engineers |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |