The Hot Carrier Degradation and Device Characteristics With Variation of Pre-Metal Dielectric Materials
- 著者名:
Seo, Y. J. Choi, W. S. Kim, S. Y. Kim, C. I. Chang, E. G. Lee, W. S. - 掲載資料名:
- Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 544
- 発行年:
- 1999
- 開始ページ:
- 179
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994508 [1558994505]
- 言語:
- 英語
- 請求記号:
- M23500/544
- 資料種別:
- 国際会議録
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