Blank Cover Image

Electromigration and 1/f Noise in Single-Crystalline, Bamboo and Polycrystalline Al Lines

著者名:
Homberg, Marc J. C. van den
Alkemade, P. F. A.
Verbruggen, A. H.
Dirks, A. G.
Ochs, E.
Radelaar, S.
さらに 1 件
掲載資料名:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
473
発行年:
1997
開始ページ:
211
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993778 [1558993770]
言語:
英語
請求記号:
M23500/473
資料種別:
国際会議録

類似資料:

1 国際会議録 Electromigration and 1/f Noise in Single-Crystalline, Bamboo, and Polycrystalline Al Lines

Homberg, Marc J. C. van den, Alkemade, P. F. A., Verbruggen, A. H., Dirks, A. G., Ochs, E., Radelaar, S.

MRS - Materials Research Society
7 国際会議録 COMPARISON BETWEEN l/f NOISE, HIGH-RESOLUTION RESISTOMETRIC, AND LIFETIME ELECTROMIGRATION STUDIES OF Al AND Al(Si)

Kraayeveld, J. R., Verbruggen, A. H., Radelaar, S.

MRS - Materials Research Society
2 国際会議録 Single-Crystalline and Bamboo Al Lines Fabricated by Graphoepitaxy: Microstructure and 1/f Noise Measurements

Homberg, Marc J. C. van den, Verbruggen, A. H., Alkemade, P. F. A., Radelaar, S.

MRS - Materials Research Society
8 国際会議録 Kinetics of Cu Segregation in Al-Cu(1 at.% Cu) Interconnects Studied by Resistance Measurements

Kalkman, A. J., Verbruggen, A. H., Janssen, G. C. A. M., Radelaar, S.

MRS - Materials Research Society
3 国際会議録 Electromigration in Short Al Lines Studied by High-Resolution Resistance Measurement

Verbruggen, A. H., Homberg, M. J. C. van den, Jacobs, L. C., Kalkman, A. J., Kraayeveld, J. R., Radelaar, S.

MRS - Materials Research Society
9 国際会議録 Further Investigations of the Microstructural Mechanism of Electromigration Failure in Al-Cu Lines With Quasi-Bamboo Microstructures

Kang, S. H., Genin, F. Y., Kim, C., Morris, J. W., Jr.

MRS - Materials Research Society
4 国際会議録 Control of the Microstructure of Al Metallization by Graphoepitaxy

Homberg, Marc J. C. Van Den, Alkemade, P. F. A., Hurd, J. L., Leusink, G. J., Radelaar, S.

MRS - Materials Research Society
10 国際会議録 "Smear-Out of the Ge/Si Interface in Gas Source MBE Monitored by RHEED"

Werner K., Butzke S., Alkemade A. F. P., Radelaar S., Trommel J., Balk P., Sloof G. W.

Kluwer Academic Publishers
5 国際会議録 Current Dependence of Reversible Electromigration Induced Resistance Changes in Short Al Lines and Interpretation of Irreversible Effects

Verbruggen, A. H., Homberg, M. J. C. van den, Kalkman, A. J., Kraayeveld, J. R., Willemsen, A. W. -J., Radelaar, S.

MRS - Materials Research Society
11 国際会議録 In-Situ X-ray Photoemission Spectromicroscopy of Electromigration in Patterned Al-Cu Lines With MAXIMUM

Solak, H. H., Lorusso, G. F., Singh, S., Cerrina, F., Underwood, J. H., Batson, P.

MRS - Materials Research Society
6 国際会議録 Electromigration and Diffusion in Short Al-Ni-Cr Lines

Jacobs, L. C., Verbruggen, A. H., Kalkman, A. J., Radelaar, S.

MRS - Materials Research Society
12 国際会議録 Electromigration in Epitaxial Copper Lines

Goindi, H.S., Shin, C.S., Frederick, M., Shusterman, Y., Kim, H., Petrov, I., Ramanath, G.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12