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Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on FT-IR-Line Sensor

著者名:
Liu, Shaohua
Solomon, Peter
Carpio, R.
Fowler, B.
Simmons, D.
Wang, J.
Wise, R.
Imper, G.
Riley, N. B.
Moslehi, M.
Ravindra, N. M.
さらに 6 件
掲載資料名:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
389
発行年:
1995
開始ページ:
269
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992924 [1558992928]
言語:
英語
請求記号:
M23500/389
資料種別:
国際会議録

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