DEPOSITION OF DIELECTRIC THIN FILMS BY IRRADIATION OF CONDENSED REACTANT MIXTURES

DEPOSITION OF DIELECTRIC THIN FILMS BY IRRADIATION OF CONDENSED REACTANT MIXTURES

著者名:

掲載資料名:

Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

335

発行年:

1994

開始ページ:

81

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992344 [1558992340]

言語:

英語

請求記号:

M23500/335

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018441
シリーズID:	PA00000011
会議名:	Symposium on metal-organic chemical vapor deposition of electronic ceramics
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.03

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1 国際会議録 GROWTH OF DIELECTRIC THIN FILMS BY IRRADIATION OF CONDENSED MOLECULAR PRECURSORS WITH SYNCHROTRON RADIATION Strongin, D.R., Moore, J.F., Ruckman, M.W., Strongin, M. Materials Research Society	7 国際会議録 Thin film dielectrics for electronics using combustion chemical vapor deposition Lin, W-Y., Huang, H., Cullen, D. K., Shoup, S. S., Cousins, D., Schmitt, J. J., Hunt, A. T., Romanofsky, R. R., … MRS-Materials Research Society
2 国際会議録 ION AND ELECTRON BEAM PROCESSING OF CONDENSED MOLECULAR SOLIDS TO FORM THIN FILMS Ruckman, M.W., Mowlem, J.K., Moore, J.F., Strongin, D.R., Strongin, M. Materials Research Society	8 国際会議録 "THE METALLIC BOND FOR MONOLAYER TRANSITION METAL LAYERS ON TRANSITION METAL SURFACES" STRONGIN m., RUCKMAN W. M., WEINERT M., WATOSON E. R., DAVENPORT W. J. Kluwer Academic Publishers
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4 国際会議録 CHEMISTRY AND DEPOSITION DRIVEN BY MONOENERGETIC SYNCHROTRON RADIATION: INITIAL STUDIES OF CONDENSED SILANES AND WATER ON NOBLE METALS Moore, J. F., Chaturvedi, Sanjay, Strongin, D. R. MRS - Materials Research Society	10 国際会議録 *LASER PHOTOLYTIC DEPOSITION OF THIN FILMS Boyer, P. K., Moore, C. A., Solanki, R., Richie, W. K., Roche, G. A, Collins,. G. J. North-Holland
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