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Dry Etching of Semi-Insulating GaAs for Device Fabrication

著者名:
掲載資料名:
Semiconductor Devices
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2733
発行年:
1996
開始ページ:
478
終了ページ:
480
出版情報:
Bellingham, WA — New Delhi: SPIE-The International Society for Optical Engineering — Narosa
ISSN:
0277786X
ISBN:
9780819421142 [0819421146]
言語:
英語
請求記号:
P63600/2733
資料種別:
国際会議録

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