Friction in surface-micromachined microengines
- 著者名:
- Miller,S.L. ( Sandia National Labs. )
- Sniegowski,J.J.
- LaVigne,G.
- McWhorter,P.J.
- 掲載資料名:
- Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2722
- 発行年:
- 1996
- 開始ページ:
- 197
- 終了ページ:
- 204
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420978 [0819420972]
- 言語:
- 英語
- 請求記号:
- P63600/2722
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
国際会議録
Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micromachining
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
6
国際会議録
Linkage design effect on the reliability of surface-micromachined microengines driving a load
SPIE-The International Society for Optical Engineering |