Integrated process for smart microstructures
- 著者名:
- Pan,T. ( Case Western Reserve Univ. )
- Melzak,J.M.
- Garverick,S.
- Mehregany,M.
- 掲載資料名:
- Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2722
- 発行年:
- 1996
- 開始ページ:
- 82
- 終了ページ:
- 94
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420978 [0819420972]
- 言語:
- 英語
- 請求記号:
- P63600/2722
- 資料種別:
- 国際会議録
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6
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