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Integrated mold/surface-micromachining process

著者名:
掲載資料名:
Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2722
発行年:
1996
開始ページ:
30
終了ページ:
35
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420978 [0819420972]
言語:
英語
請求記号:
P63600/2722
資料種別:
国際会議録

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