60J XeCl laser for single-shot excimer laser annealing
- 著者名:
Godard,B. ( SOPRA,Bois-Colombes ) Laborde,P. ( SOPRA,Bois-Colombes ) Dutems,C. ( SOPRA,Bois-Colombes ) Prochasson,S. ( SOPRA,Bois-Colombes ) Zahorski,D. ( SOPRA,Bois-Colombes ) Stehle,M. ( SOPRA,Bois-Colombes ) Bonnet,J. ( ONERA,Palaiseau,France ) Pigache,D. ( ONERA,Palaiseau,France ) - 掲載資料名:
- XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3092
- 発行年:
- 1997
- 開始ページ:
- 161
- 終了ページ:
- 164
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425072 [0819425079]
- 言語:
- 英語
- 請求記号:
- P63600/3092
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
7
国際会議録
Single-Shot Excimer Laser Annealing and In Process Ellipsometry Analysis for Ultra Shallow Junctions
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |