Microwork transfer system in a nanomanufacturing world

Microwork transfer system in a nanomanufacturing world

著者名:

Tsuchiya,K. ( Univ.of Tokyo (Japan) )
Nakao,M. ( Univ.of Tokyo (Japan) )
Okusa,T. ( Univ.of Tokyo (Japan) )
Hatamura,Y. ( Univ.of Tokyo (Japan) )
Matsumoto,K. ( Univ.of Tokyo (Japan) )

掲載資料名:

Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3202

発行年:

1998

開始ページ:

147

終了ページ:

156

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426345 [0819426342]

言語:

英語

請求記号:

P63600/3202

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018329
シリーズID:	PA00000029
会議名:	Intelligent Systems and Advanced Manufacturing : Microrobotics and,Microsystem Fabrication
回次:	1997
会議開催地:	Pittsburgh, PA. USA
会議開催年:	1997.10.16-1997.10.17

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