Advantages of SOI technology in low-voltage ULSIs (Invited Paper)
- 著者名:
Yoshimi,M. ( Toshiba Corp. (Japan) ) Kawanaka,S. ( Toshiba Corp. (Japan) ) Yamada,T. ( Toshiba Corp. (Japan) ) Terauchi,M. ( Toshiba Corp. (Japan) ) Shino,T. ( Toshiba Corp. (Japan) ) Fuse,T. ( Toshiba Corp. (Japan) ) Oowaki,Y. ( Toshiba Corp. (Japan) ) Watanabe,S. ( Toshiba Corp. (Japan) ) - 掲載資料名:
- Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3212
- 発行年:
- 1997
- 開始ページ:
- 178
- 終了ページ:
- 187
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426444 [081942644X]
- 言語:
- 英語
- 請求記号:
- P63600/3212
- 資料種別:
- 国際会議録
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