Scaling self-aligned contacts for 0.25ヲフ m and below
- 著者名:
Perera,A. ( Motorola ) Pfiester,J.R. ( Hewlett-Packard Co. ) Lii,T. ( Motorola ) Feng,C. ( Semiconductor Technology Lab. ) Bhat,M. ( Motorola ) Dao,T. ( Semiconductor Technology Lab. ) Molloy,J. ( Semiconductor Technology Lab. ) Blackwell,M. ( Motorola ) J. Cecil, ( Motorola ) - 掲載資料名:
- Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3212
- 発行年:
- 1997
- 開始ページ:
- 171
- 終了ページ:
- 175
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426444 [081942644X]
- 言語:
- 英語
- 請求記号:
- P63600/3212
- 資料種別:
- 国際会議録
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