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Dynamically tuned vibratory micromechanical gyroscope accelerometer

著者名:
Lee,B. ( Samsung Advanced Institute of Technology (Korea) )
Oh,Y. ( Samsung Advanced Institute of Technology (Korea) )
Park,K. ( Samsung Electro-Mechanics Co. (Korea) )
Ha,B. ( Samsung Advanced Institute of Technology (Korea) )
Ko,Y. ( Samsung Advanced Institute of Technology (Korea) )
Kim,J. ( Samsung Advanced Institute of Technology (Korea) )
Kang,S. ( Samsung Advanced Institute of Technology (Korea) )
Choi,S. ( Samsung Advanced Institute of Technology (Korea) )
Song,C. ( Samsung Advanced Institute of Technology (Korea) )
さらに 4 件
掲載資料名:
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3242
発行年:
1997
開始ページ:
86
終了ページ:
95
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426802 [0819426806]
言語:
英語
請求記号:
P63600/3242
資料種別:
国際会議録

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