Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors

Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors

著者名:

Chang,C.L. ( National Taiwan Univ. )
Chang,P.Z. ( National Taiwan Univ. )
Huang,R.S. ( National Tsing Hua Univ.(Taiwan) )
Chang,C.P. ( National Tsing Hua Univ.(Taiwan) )
Cheng,M.C. ( National Tsing Hua Univ.(Taiwan) )

掲載資料名:

Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3242

発行年:

1997

開始ページ:

145

終了ページ:

156

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426802 [0819426806]

言語:

英語

請求記号:

P63600/3242

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018325
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart electronics and MEMS
回次:	1997
会議開催地:	Adelaide, Australia
会議開催年:	1997.12.11-1997.12.13

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