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Laser micromachining of chemically altered polymers (Invited Paper)

著者名:
Lippert,T.K. ( Los Alamos National Lab. )  
掲載資料名:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3274
発行年:
1998
開始ページ:
204
終了ページ:
208
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427137 [0819427136]
言語:
英語
請求記号:
P63600/3274
資料種別:
国際会議録

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