Hot-carrier degradation study of high-density plasma(HDP)oxide deposition process in deep-submicron NMOSFETs
- 著者名:
- 掲載資料名:
- In-Line Methods and Monitors for Process and Yield Improvement
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3884
- 発行年:
- 1999
- 開始ページ:
- 116
- 終了ページ:
- 123
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434814 [0819434817]
- 言語:
- 英語
- 請求記号:
- P63600/3884
- 資料種別:
- 国際会議録
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9
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Effects of high-density plasma processing on MOSFET matching,noise,and hot carrier reliability
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A Density Functional Theory Study of Chemical Vapor Deposition of Copper from (hfac) CuL Compounds
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