SCALPEL mask blank fabrication | 東京工業大学附属図書館文献データベース

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SCALPEL mask blank fabrication

著者名:

Saunders,T.E. ( Lucent Technologies/Bell Labs. )

さらに 5 件

掲載資料名:

Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3874

発行年:

1999

開始ページ:

248

終了ページ:

255

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434715 [081943471X]

言語:

英語

請求記号:

P63600/3874

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018100
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and microfabrication process technology
回次:	1999 : 5th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1999.09.20-1999.09.22

類似資料:

1 国際会議録 Overview of SCALPEL mask technology Bogart,G.R., Novembre,A.E., Kornblit,A., Peabody,M.L., Farrow,R.C., Blakey,M.I., Kasica,R.J., Liddle,J.A., … SPIE - The International Society for Optical Engineering	7 国際会議録 Techniques to inspect SCALPEL masks Taylor,D., Howard,W.B., Kasica,R.J., Farrow,R.C., Novembre,A.E., Caminos,C., Knurek,C.S. SPIE - The International Society for Optical Engineering
2 国際会議録 200-mm SCALPEL mask development Bogart,G.R., Novembre,A.E., Kornblit,A., Peabody,M.L., Farrow,R.C., Blakey,M.I., Kasica,R.J., Liddle,J.A., … SPIE - The International Society for Optical Engineering	8 国際会議録 Patterning of membrane masks for profection e-baem lithography Fetter,L.A., Biddick,C., Blakey,M.I., Liddle,A.J., Peabody,M.L., Novembre,A.E., Tennant,D.M. SPIE-The International Society for Optical Engineering
3 国際会議録 Fabrication and commercialization of scalpel masks (Invited Paper) Novenber,A.E., Peabody,M.L., Blakey,M.I., Farrow,R.C., Kasica,R.J., Liddle,J.A., Saunders,T.E., Tennant,D.M. SPIE-The International Society for Optical Engineering	9 国際会議録 SCALPEL masks J.A. Liddle, M. Blakey, K. Bolan, R. Farrow, L.A. Fetter Society of Photo-optical Instrumentation Engineers
4 国際会議録 Yield,metrology,and inspection characteristics of SCALPEL masks Peabody,M.L., Blakey,M.I., Farrow,R.C., Kasica,R.J., Liddle,J.A., Novembre,A.E., Saunders,T.E., Tennant,D.M., Windt,D.L. SPIE-The International Society for Optical Engineering	10 国際会議録 Space-charge results from the SCALPEL proof-of-concept system Liddle,J.A., Blakey,M.I., Gallatin,G.M., Knurek,C.S., Mkrtchyan,M.M., Novembre,A.E., Waskiewicz,W.K. SPIE - The International Society for Optical Engineering
5 国際会議録 Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission Farrow,R.C., Blakey,M.I., Kasica,R.J., Liddle,J.A., Mkrtchyan,M.M., Novembre,A.E., Peabody,M.L., Saunders,T.E., … SPIE-The International Society for Optical Engineering	11 国際会議録 Fabrication processes for SCALPEL mask blanks Huggins,H.A., Bolan,K.J., Liddle,J.A., Peabody,M., Tarascon,R.G., Windt,D.L. SPIE-The International Society for Optical Engineering
6 国際会議録 Production of SCALPEL masks in a commercial mask facility Newport,C.L., Parker,J., Smith,K.M., Benveniste,A., Kim,N.-W., Reyland,D., Farrow,R.C., Novembre,A.E., Kasica,R.J., … SPIE - The International Society for Optical Engineering	12 国際会議録 SCALPEL proof-of-concept system:preliminary lithography results Waskiewicz,W.K., Biddick,C.J., Blakey,M.I., Brady,K.J., Camarda,R.M., Connelly,W.F., Crorken,A.H., Custy,J.P., … SPIE-The International Society for Optical Engineering

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