W-coating for MEMS

W-coating for MEMS

著者名:

Mani,S.S. ( Sandia National Labs. )
Fleming,J.G.
Sniegowski,J.J.

掲載資料名:

Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3874

発行年:

1999

開始ページ:

150

終了ページ:

157

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434715 [081943471X]

言語:

英語

請求記号:

P63600/3874

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018100
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and microfabrication process technology
回次:	1999 : 5th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1999.09.20-1999.09.22

類似資料:

1 国際会議録 High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS Fleming,J.G., Mani,S.S., Lin,S.-Y. SPIE-The International Society for Optical Engineering	7 国際会議録 Stress and curvature in MEMS mirrors Gass, F. R., Dagel, D. J., Adams, D.P., Grossetete, G.D., Blum Spahn, O., Kemme, S.A., Mani, S.S., Malloy, K.J. SPIE-The International Society for Optical Engineering
2 国際会議録 Selective W for coating and releasing MEMS devices Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., LaVan, D. … MRS-Materials Research Society	8 国際会議録 Surface preparation for selective tungsten deposition on MEMS structures Resnick,P.J., Mani,S.S. SPIE-The International Society for Optical Engineering
3 国際会議録 Chemical vapor deposition coating for micromachines Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., Dugger, M. … MRS-Materials Research Society	9 国際会議録 Thin Teflon-like films for MEMS: film properties and reliability studies Smith,B.K., Brown,C.D., LaVigne,G., Sniegowski,J.J. SPIE-The International Society for Optical Engineering
4 国際会議録 Integrated mold/surface-micromachining process Barron,C.C., Fleming,J.G., Montague,S., Sniegowski,J.J., Hetherington,D.L. SPIE-The International Society for Optical Engineering	10 国際会議録 SAMPLE (Sandia agile MEMS prototyping,layout tools,and education) Davies,B.R., Craig Barron,C., Sniegowski,J.J., Rodgers,M.S. SPIE-The International Society for Optical Engineering
5 国際会議録 Chemical-mechanical polishing:enhancing the manufacturability of MEMS Sniegowski,J.J. SPIE-The International Society for Optical Engineering	11 国際会議録 Development, test, and evaluation of MEMS micromirrors for free-space optical communications Sniegowski, J. J., Rodgers, S. M., Boone, B. G., Bruzzi, J. R., Drabenstadt, C. W., Kluga, B. E., Rogala, E. W., … SPIE - The International Society of Optical Engineering
6 国際会議録 Failure analysis of tungsten-coated polysilicon micromachined microengines Walraven,J.A., Mani,S.S., Fleming,J.G., Headley,T.J., Kotula,P.G., Pimentel,A.A., Rye,M.J., Tanner,D.M., Smith,N.F. SPIE-The International Society for Optical Engineering	12 国際会議録 Combining the best of bulk and surface micromachining using Si {111} substrates Fleming,J.G. SPIE-The International Society for Optical Engineering

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