Step and stamp imprint lithography using a commercial flip chip bonder
- 著者名:
- Haatainen,T. ( VTT Microelectronics )
- Ahopelto,J.
- Gruetzner,G.
- Finck,M.
- Pfeiffer,K.
- 掲載資料名:
- Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3997
- 発行年:
- 2000
- 開始ページ:
- 874
- 終了ページ:
- 880
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436153 [0819436151]
- 言語:
- 英語
- 請求記号:
- P63600/3997
- 資料種別:
- 国際会議録
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11
国際会議録
Fabrication of Step and Flash imprint lithography templates using commercial mask processes
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