Development of an electric capillary discharge source
- 著者名:
Fornaciari,N.R. ( Sandia National Labs. ) Chang,J.J. Folk,D.R. Gianoulakis,S.E. Goldsmith,J.E.M. Kubiak,G.D. Long,B.C. O'Connell,D.J. Shimkaveg,G.M. Silfvast,W.T. Stewartka,K.D. - 掲載資料名:
- Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3997
- 発行年:
- 2000
- 開始ページ:
- 120
- 終了ページ:
- 125
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436153 [0819436151]
- 言語:
- 英語
- 請求記号:
- P63600/3997
- 資料種別:
- 国際会議録
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