Silicon-oxynitride (SiON) for photonic integrated circuits

Silicon-oxynitride (SiON) for photonic integrated circuits

著者名:

掲載資料名:

Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

574

発行年:

1999

開始ページ:

255

出版情報:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558994812 [1558994815]

言語:

英語

請求記号:

M23500/574

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018052
シリーズID:	PA00000011
会議名:	Multicomponent Oxide Films for Electronics : Symposium
回次:	1999
会議開催地:	San Francisco, CA, USA
会議開催年:	1999.04.06-1999.04.08

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