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Metal-organic chemical vapor deposition of metal oxides: From precursor synthesis to thin films

著者名:
Belot, J. A.
Wang, A.
Edleman, N. L.
Babcock, J. R.
Metz, M. V.
Marks, T. J.
Markworth, P. R.
Chang, R. P. H.
さらに 3 件
掲載資料名:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
574
発行年:
1999
開始ページ:
37
出版情報:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994812 [1558994815]
言語:
英語
請求記号:
M23500/574
資料種別:
国際会議録

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