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Characterization of morphology and defects in silicon-germanium virtual substrates

著者名:
掲載資料名:
Morphological and compositional evolution of heteroepitaxial semiconductor thin films : symposium held April 24-27, 2000, San Francisco, California
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
618
発行年:
2000
開始ページ:
265
出版情報:
Warrendale, Pennsylvania.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995260 [1558995269]
言語:
英語
請求記号:
M23500/618
資料種別:
国際会議録

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