Microstructural Characterization of Thin Polyimide Films by Positron Lifetime Spectroscopy

Microstructural Characterization of Thin Polyimide Films by Positron Lifetime Spectroscopy

著者名:

掲載資料名:

Polymers for microelectronics : resists and dielectrics

シリーズ名:

ACS symposium series

シリーズ巻号:

537

発行年:

1994

開始ページ:

535

出版情報:

Washington, DC: American Chemical Society

ISSN:

00976156

ISBN:

9780841227217 [0841227217]

言語:

英語

請求記号:

A05800/537

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018036
シリーズID:	PA00000004
会議名:	National Meeting of the American Chemical Society
回次:	203rd
会議開催地:	San Francisco, CA, USA
会議開催年:	1992.04.05-1992.04.10

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