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Acid-Catalyzed Dehydration: A New Mechanism for Chemically Amplified Lithographic Imaging

著者名:
掲載資料名:
Polymers for microelectronics : resists and dielectrics
シリーズ名:
ACS symposium series
シリーズ巻号:
537
発行年:
1994
開始ページ:
64
出版情報:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841227217 [0841227217]
言語:
英語
請求記号:
A05800/537
資料種別:
国際会議録

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