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Polarity Change for the Design of Chemical Amplification Resists

著者名:
Ito, Hiroshi  
掲載資料名:
Irradiation of polymeric materials : processes, mechanisms, and applications
シリーズ名:
ACS symposium series
シリーズ巻号:
527
発行年:
1993
開始ページ:
197
出版情報:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841226623 [0841226628]
言語:
英語
請求記号:
A05800/527
資料種別:
国際会議録

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