In Situ FTIR Spectroscopic Detection of Absorbed Species on Sapphire Substrates in a Diamond ECR-PACVD System

In Situ FTIR Spectroscopic Detection of Absorbed Species on Sapphire Substrates in a Diamond ECR-PACVD System

著者名:

掲載資料名:

In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

502

発行年:

1998

開始ページ:

269

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994072 [1558994076]

言語:

英語

請求記号:

M23500/502

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017996
シリーズID:	PA00000011
会議名:	Symposium on in situ process diagnostics and intelligent materials processing
回次:	1997
会議開催地:	Boston, MA, USA
会議開催年:	1997.12.02-1997.12.05

類似資料:

1 国際会議録 Raman and FTIR Study of Neutron Irradiated CVD Diamond Khasawinah, S., Popovici, G., Prelas, M. A., McCormick, M., Loyalka, S. K., Manning, G., Farmer, J., White, H. W., … MRS - Materials Research Society	7 国際会議録 In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD Sun, G.S., Luo, M.C., Wang, L., Zhu, S.R., Li, J.M., Zeng, Y.P., Lin, L.Y. Trans Tech Publications
2 国際会議録 Determination of Hydrogen in CVD Diamond by Notched Neutron Spectrum Technique and FTIR Golshani, F., Miller, W. H., Prelas, M. A., Sung, T., Popovici, G., Manning, G., Loyalka, S. K., Shahedipour, F., White, … MRS - Materials Research Society	8 国際会議録 In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD Sun, G.S., Luo, M.C., Wang, L., Zhu, S.R., Li, J.M., Zeng, Y.P., Lin, L.Y. Trans Tech Publications
3 国際会議録 Growth and Characterization of Polycrystalline Diamond Thin Films on Porous Silicon by Hot Filament Chemical Vapor Deposition Mirzakuchaki, S., Charlson, E. J., Charlson, E. M., Stacy, T., Shahedipour, F., White, H. W. MRS - Materials Research Society	9 国際会議録 Microstructure and physical properties of GaN films on sapphire substrates Chen, Z., Zhang, R., Zhu, J., Shen, B., Zhou, Y., Chen, P., Li, W., Shi, Y., Gu, S., Zheng, Y-D. MRS-Materials Research Society
4 国際会議録 Low-Temperature Synthesis of Si-C-N and C-N Films by IR-Laser Assisted ECR-PECVD Zhu, S., White, H. W. MRS - Materials Research Society	10 国際会議録 ABSORPTION SPECTROSCOPY OF GASEOUS SPECIES IN DIAMOND CVD SYSTEMS Childs, M.A., Toyoda, H., Menningen, M.L., Anderson, L.W., Lawler, J.E. Electrochemical Society
5 国際会議録 MORPHOLOGY OF DIAMOND FILMS PRODUCED BY ECR-PACVD Jin, S., Moustakas, T.D. Materials Research Society	11 国際会議録 A Highly Adhesive Gold-Based Metallization System for CVD Diamond Substrates Jahangir, Farhat, Naseem, H.A., Brown, W.D., Malshe, A.P., Ang, S.S. Electrochemical Society
6 国際会議録 Epitaxial Lateral Overgrowth of GaN on SiC and Sapphire Substrates Yu, Z., Johnson, M. A. L., Brown, J. D., El-Masry, N. A., Muth, J. F., Cook, J. W., Jr., Schetzina, J. F., Haberern, K. … MRS - Materials Research Society	12 国際会議録 DIAMOND DETECTORS FOR THE SUPERCOLLIDER Kania, D.R., Gan, K.K., Kagan, H., Kass, R., Malchow, R., Morrow, F., Palmer, W.F., White, C., Zhao, S., Lee, M.H., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12