Characterization of Carbon Nitride Films Produced by Pulsed Laser Deposition
- 著者名:
Friedmann, T. A. Tallant, D. R. Barbour, J. C. Sullivan, J. P. Siegal, M. P. Simpson, R. L. Mikkalson, J. McCarty, K. F. - 掲載資料名:
- Film synthesis and growth using energetic beams : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 388
- 発行年:
- 1995
- 開始ページ:
- 393
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992917 [155899291X]
- 言語:
- 英語
- 請求記号:
- M23500/388
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
MRS - Materials Research Society |
2
国際会議録
NUCLEATION AND GROWTH OF CUBIC BORON NITRIDE FILMS PRODUCED BY ION-ASSISTED PULSED LASER DEPOSITION
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
6
国際会議録
Evaluation of Amorphous Diamond-Like Carbon and Boron Nitride Films as Low Permittivity Dielectrics
MRS - Materials Research Society |
Materials Research Society |