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Substrate Heating Measurements in Pulsed Ion Beam Film Deposition

著者名:
Olson, J. C.
Thompson, M. O.
Davis, H. A.
Rej, D. J.
Waganaar, W. J.
Tallant, D. R.
さらに 1 件
掲載資料名:
Film synthesis and growth using energetic beams : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
388
発行年:
1995
開始ページ:
171
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992917 [155899291X]
言語:
英語
請求記号:
M23500/388
資料種別:
国際会議録

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