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GRAIN BOUNDARY LOCATION-CONTROLLED POLY-Si FILMS FOR TFT DEVICES OBTAINED VIA NOVEL EXCIMER LASER PROCESS

著者名:
掲載資料名:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
358
発行年:
1995
開始ページ:
903
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
言語:
英語
請求記号:
M23500/358
資料種別:
国際会議録

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