STRUCTURAL AND ELECTRICAL PROPERTIES OF UNDOPED MICROCRYSTALLINE SILICON GROWN BY 70 MHz AND 13.56 MHz PECVD
- 著者名:
Fluckiger, R. Meier, J. Crovini, G. Demichelis, F. Giorgis, F. Pirri, C. F. Tresso, E. Pohl, J. Rigato, V. Zandolin, S. Caccavale, F. - 掲載資料名:
- Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 358
- 発行年:
- 1995
- 開始ページ:
- 751
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992597 [1558992596]
- 言語:
- 英語
- 請求記号:
- M23500/358
- 資料種別:
- 国際会議録
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