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Spectroellipsometric characterization of SIMOX with a very thin Si layer

著者名:
Yamaguchi,T. ( Shizuoka Univ. )
Jayatissa,A.H.
Tonooka,S.
Aoyama,M.
Tabe,M.
Kanda,Y.
さらに 1 件
掲載資料名:
International Symposium on Polarization Analysis and Applications to Device Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2873
発行年:
1996
開始ページ:
278
終了ページ:
281
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422712 [0819422711]
言語:
英語
請求記号:
P63600/2873
資料種別:
国際会議録

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