Rapid prototyping of a micro pump with laser micromachining
- 著者名:
Wong,C.C. ( Sandia National Labs. ) Chu,D. Liu,S.L. Tuck,M.R. Mahmud,Z. Amatucci,V. - 掲載資料名:
- Micromachined Devices and Components
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2642
- 発行年:
- 1995
- 開始ページ:
- 156
- 終了ページ:
- 165
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420084 [0819420085]
- 言語:
- 英語
- 請求記号:
- P63600/2642
- 資料種別:
- 国際会議録
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3
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Laser micromachine and acid-etched Fabry-perot cavities in silica fiber (Invited Paper) [603815]
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