Three-dimensional structures for micro-optical mechanical systems in standard CMOS
- 著者名:
- Kruglick,E.J.J. ( Univ.of California/Los Angeles )
- Damle,S.
- Pister,K.S.J.
- 掲載資料名:
- Micromachined Devices and Components
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2642
- 発行年:
- 1995
- 開始ページ:
- 33
- 終了ページ:
- 39
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420084 [0819420085]
- 言語:
- 英語
- 請求記号:
- P63600/2642
- 資料種別:
- 国際会議録
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