Macroporous silicon formation for micromachining
- 著者名:
- Ohji,H. ( Deift Univ.of Technology (Netherlands) )
- Lahteenmaki,S. ( Helsinki Univ.of Technology (Finland) )
- French,P.J. ( Delft Univ.of Technology (Netherlands) )
- 掲載資料名:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3223
- 発行年:
- 1997
- 開始ページ:
- 189
- 終了ページ:
- 197
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- 言語:
- 英語
- 請求記号:
- P63600/3223
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |