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SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

著者名:
Craig Barron,C. ( Sandia National Labs. )
Davies,B.R. ( Sandia National Labs. )
Sniegowski,J.J. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
Comtois,J.H. ( Air Force Phillips Lab. )
Michalicek,M.A. ( Air Force Phillips Lab. )
さらに 1 件
掲載資料名:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3223
発行年:
1997
開始ページ:
10
終了ページ:
16
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
言語:
英語
請求記号:
P63600/3223
資料種別:
国際会議録

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