Gray map reference pattern generator of a die-to-database mask inspection system for 256-Mb and 1-Gb DRAMs
- 著者名:
- Tsuchiya,H. ( Toshiba Corp. (Japan) )
- Isomura,I. ( Toshiba Corp. (Japan) )
- Watanabe,T. ( Toshiba Corp. (Japan) )
- Yamashita,K. ( Toshiba Corp. (Japan) )
- 掲載資料名:
- Photomask and X-Ray Mask Technology V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3412
- 発行年:
- 1998
- 開始ページ:
- 544
- 終了ページ:
- 551
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428646 [0819428647]
- 言語:
- 英語
- 請求記号:
- P63600/3412
- 資料種別:
- 国際会議録
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