Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target
- 著者名:
- Huang,S.M. ( National Univ.of Singapore )
- Lu,Y.F.
- Sun,Z.
- 掲載資料名:
- Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3933
- 発行年:
- 2000
- 開始ページ:
- 478
- 終了ページ:
- 486
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435507 [0819435503]
- 言語:
- 英語
- 請求記号:
- P63600/3933
- 資料種別:
- 国際会議録
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1
国際会議録
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