Pulsed-Laser deposition of AIN thin films
- 著者名:
Lu,Y.F. ( National Univ.of Singapore ) Ren,Z.M. Ni,H.Q. Goh,Y.W. Cheong,B.A. Chow,S.K. Wang,J.P. Chong,T.C. - 掲載資料名:
- Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3933
- 発行年:
- 2000
- 開始ページ:
- 182
- 終了ページ:
- 189
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435507 [0819435503]
- 言語:
- 英語
- 請求記号:
- P63600/3933
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |