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Novel design of a MEMS-based tactile sensor

著者名:
Singh,R. ( Singapore Polytechnic )  
掲載資料名:
Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3893
発行年:
1999
開始ページ:
250
終了ページ:
261
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434944 [0819434949]
言語:
英語
請求記号:
P63600/3893
資料種別:
国際会議録

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