Copper contamination effect on the reliability of devices in the BiCMOS technology
- 著者名:
- Low,K.S. ( Infineon Technologies AG(Germany)and Univ.of Newcastle upon Tyne )
- Schwerd,M.
- Koerner,H.
- Barth,H.J.
- O'Neil,A.
- 掲載資料名:
- Multilevel Interconnect Technology III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3883
- 発行年:
- 1999
- 開始ページ:
- 24
- 終了ページ:
- 33
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434807 [0819434809]
- 言語:
- 英語
- 請求記号:
- P63600/3883
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
ESA Publications Division |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
国際会議録
Application of a ferroelectric liquid-crystal-on-silicon display in fringe projections setups
SPIE-The International Society for Optical Engineering |
Electrochemical Society |