Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
- 著者名:
Ren,Z.M. ( National Univ.of Singapore ) Lu,Y.-F. Mai,Z.H. Cheong,B.A. Chow,S.K. Wang,J.P. Chong,T.C. - 掲載資料名:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3618
- 発行年:
- 1999
- 開始ページ:
- 520
- 終了ページ:
- 528
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- 言語:
- 英語
- 請求記号:
- P63600/3618
- 資料種別:
- 国際会議録
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