Advances in pulsed laser deposition growth of nitride thin films

Advances in pulsed laser deposition growth of nitride thin films

著者名:

Fernandez,F.E. ( Univ.of Puerto Rico )

掲載資料名:

Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3618

発行年:

1999

開始ページ:

475

終了ページ:

486

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430885 [0819430889]

言語:

英語

請求記号:

P63600/3618

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017609
シリーズID:	PA00000029
会議名:	Photonics West : Laser Applications in Microelectronic and Optoelectronic Manufacturing
回次:	1999 : 4th
会議開催地:	San Jose, CA, USA
会議開催年:	1999.01.25-1999.01.27

類似資料:

1 国際会議録 Study of KTN Thin Films of Variable Composition Grown by Pulsed Laser Deposition Fernandez, F. E., Pumarol, M., Marrero, P., Rodriguez, E., Mourad, H. A. MRS - Materials Research Society	7 国際会議録 Microwave Properties of Strontium Barium Niobate Thin Films Grown by Pulsed Laser Deposition Rodriguez-Santiago, Victor, Gonzalez, Yelitza, Fernandez, Felix E., Mueller, Carl H., Keuls, Fred W. Van, Miranda, Felix … Materials Research Society
2 国際会議録 Structure and Properties of III-N Semiconductor Thin Films Grown at Low Temperatures by N-Radical-Assisted Pulsed Laser Deposition Fernandez, F. E., Pumarol, M., Martinez, A., Pantojas, V., Garcia, M. MRS - Materials Research Society	8 国際会議録 Ion-source-assisted pulsed-laser deposition of carbon nitride thin films He,Z.F., Lu,Y.F., Mai,Z.H., Ren,Z.M. SPIE - The International Society for Optical Engineering
3 国際会議録 Structural Characterization of Pulsed Laser Deposited KTN Thin Films Savvinov, A. A., Siny, I. G., Katiyar, R. S., Pumarol, M., Mourad, H. A., Fernandez, F. E. MRS - Materials Research Society	9 国際会議録 Ion-source-assisted pulsed laser deposition of carbon nitride thin films He,Z.F., Lu,Y.F., Mai,Z.H., Ren,Z.M. SPIE - The International Society for Optical Engineering
4 国際会議録 Pulsed-laser deposition growth of SBN and correlation study of structure and optical properties Fernandez,F.E., Gonzalez,Y., Liu,H., Rodrrguez,E., Rodrfguez,V., Jia,W. SPIE - The International Society for Optical Engineering	10 国際会議録 Electron cyclotron resonance plasma-assisted pulsed laser deposition of carbon nitride thin films Shi,W., Wu,J.D., Sun,J., Ling,H., Ying,Z.F., Zhou,Z.Y., Li,F.M. SPIE-The International Society for Optical Engineering
5 国際会議録 Bismuth thin films obtained by pulsed laser deposition Flores,T., Arronte,M., Rodriguez,E., Ponce,L., Alonso,J.C., Carcia,C., Fernandez,M., Haro,E. SPIE - The International Society for Optical Engineering	11 国際会議録 Pulsed laser deposition of thin refractory metal nitride films Fernandez, M., Bereznai, M., Caricato, A.P., D'Anna, E., Juhasz, A., Leggieri, G., Luches, A., Majni, G., Martino, M., … SPIE-The International Society for Optical Engineering
6 国際会議録 Pulsed-Laser deposition of AIN thin films Lu,Y.F., Ren,Z.M., Ni,H.Q., Goh,Y.W., Cheong,B.A., Chow,S.K., Wang,J.P., Chong,T.C. SPIE - The International Society for Optical Engineering	12 国際会議録 PULSED EXCIMER LASER ABLATION DEPOSITION OF BORON NITRIDE ON Si(100) SUBTRATES Friedmann, T.A., McCarty, K.F., Klaus, E.J., Boehme, D., Clift, W.M., Johnsen, H.A., Mills, M.J., Ottesen, D.K., Stulen, … Materials Research Society

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