Laser direct writing of circuit elements and sensors
- 著者名:
Pique,A. ( Naval Research Lab. ) Chrisey,D.B. Auyeung,R.C.Y. Lakeou,S. Chung,R. McGill,R.A. Wu,P.K. Duignan,M.T. Fitz-Gerald,J. Wu,H.D. - 掲載資料名:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3618
- 発行年:
- 1999
- 開始ページ:
- 330
- 終了ページ:
- 339
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- 言語:
- 英語
- 請求記号:
- P63600/3618
- 資料種別:
- 国際会議録
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