1-kHz 5-W ArF excimer laser for microlithography with highly narrow 0.7-pm bandwidth and issues on durability related to optical damage | 東京工業大学附属図書館文献データベース

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1-kHz 5-W ArF excimer laser for microlithography with highly narrow 0.7-pm bandwidth and issues on durability related to optical damage

著者名:

Enami,T. ( Komatsu Ltd. )

さらに 6 件

掲載資料名:

Laser-Induced Damage in Optical Materials: 1998

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3578

発行年:

1999

開始ページ:

31

終了ページ:

42

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430458 [0819430455]

言語:

英語

請求記号:

P63600/3578

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017605
シリーズID:	PA00000029
会議名:	Laser Damege : Laser-Induced Damage in Optical Materials
回次:	1998
会議開催地:	Boulder, CO, USA
会議開催年:	1998.09.28-1998.10.01

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